Eeffects of Zn diffusion into ZnO:Al thin films prepared by rf reactive sputtering.
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Varistor performance of nanocrystalline Zn–Bi–O thin films prepared by reactive RF magnetron sputtering at room temperature
The Zn–Bi–O films were deposited by reactive radio frequency magnetron sputtering in oxygen atmosphere from ZnBi alloy target (wt% ratio Zn:Bi=9:1) on glass substrate at room temperature. The XRD patterns show that the films deposited on tin-doped indium oxide/glass substrates were nanocrystalline. The microstructure of Bi-doped ZnO films was studied by scanning electron microscopy in combinati...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1990
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.33.194